An Efficient Improvement for Barrier Effect of W-Filled Contact
| Autor: | Kuang-Yang Chan, Ting-Chang Chang, Mao-Chich Chen Mou-Shiung Lin, Wen-Kuan Yeh, Ming-Hsing Tsai, Sheng‐ Hsiung Chen |
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| Rok vydání: | 1995 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.1995.pc-3-2 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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