A 100-femtosecond electron beam blanking system

Autor: Ludwig Josef Balk, W. Reiners, D. Kother, Erich Kubalek, Ingo Wolff, J. Fehr
Rok vydání: 1990
Předmět:
Zdroj: Microelectronic Engineering. 12:221-226
ISSN: 0167-9317
DOI: 10.1016/0167-9317(90)90035-r
Popis: Conventional electron beam blanking system show the drawbacks of a fixed electron energy, a fixed repetition rate or even unsuitability for repetition rates in the GHz region. This paper describes the development of an ultrafast electron beam blanking system, intended for testing microwave integrated circuits with very high temporal resolution. 100fs electron pulses can be generated with repetition rates in the range from 8 to 18 GHz.
Databáze: OpenAIRE