| Popis: |
A self-consistent kinetic model is developed to study dc flowing glow discharges in N/sub 2//O/sub 2/ mixtures. This model includes the calculation of electron energy distribution functions and electron rate coefficients coupled with detailed vibrational kinetics of N/sub 2/ molecules, chemical kinetics taking into account a large set of neutral, excited and charged species, interaction of N and O atoms at the discharge tube wall, and the thermal balance of the discharge. The results of this model agree reasonably well with the measurements of the electronic density, the gas temperature, the reduced electric field, the vibrational temperature of N/sub 2/ and the concentration of O, N atoms, NO molecules, N/sub 2/(C), N/sub 2//sup +/(B), and NO(/spl gamma/) excited states. The comparison was performed in a N/sub 2/-O/sub 2/ discharge at pressure p=2 Torr, for discharge currents I=15, 30, and 80 mA, a flow rate Q=100 sccm, and O/sub 2/ percentages ranging from 0 up to 100%,. > |
