Fabrication of a Biomimetic Corrugated Polysilicon Diaphragm with Attached Single Crystal Silicon Proof Masses

Autor:	Ronald N. Miles, C. Gibbons, Weili Cui, N. C. Tien, Kyutae Yoo, Quang T. Su, J.-L.A. Yeh
Rok vydání:	2001
Předmět:	Materials science Fabrication Silicon business.industry Laser vibrometry Diaphragm (acoustics) chemistry.chemical_element Silicon on insulator Nanotechnology chemistry Deep reactive-ion etching Optoelectronics Single crystal silicon Wafer business
Zdroj:	Transducers ’01 Eurosensors XV ISBN: 9783540421504
DOI:	10.1007/978-3-642-59497-7_30
Popis:	This paper reports a new approach to the fabrication of 3D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. The fabrication process has been applied to a 1 mm × 2 mm × 1.2 µn diaphragm designed for a biomimetic directional microphone. The membrane has two 200 µm × 380 µm × 20 µm silicon proof masses, solid stiffeners, and a 20 µm deep corrugation. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f7fe02ed51051892d31131addcf81b34 https://doi.org/10.1007/978-3-642-59497-7_30 Zobrazit plný text záznamu