Performance Trade-offs of an Interferometric Micro-g Resolution Accelerometer

Autor:	Maximillian A. Perez, Andrei M. Shkel
Rok vydání:	2006
Předmět:	Physics Surface micromachining Interferometry Inertial frame of reference Optics business.industry Trade offs Bandwidth (signal processing) Time domain Accelerometer business Inertial navigation system
Zdroj:	2006 5th IEEE Conference on Sensors.
DOI:	10.1109/icsens.2007.355882
Popis:	A high resolution bulk micromachined accelerometer based on transmission-type intrinsic Fabry-Perot interferometer has been experimentally evaluated via direct inertial characterization for the first time. The device characterization includes frequency and time domain evaluation. The sensor characteristics of bandwidth, range, sensitivity, and resolution are obtained and the trade-offs between these performance characteristics are examined. The sensor performance, which approaches its theoretical limit with a maximum resolution of 2.9 mug is obtained, demonstrating inertial navigation grade performance.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f7f67f33a81087d39e715cd4a80df62f https://doi.org/10.1109/icsens.2007.355882 Zobrazit plný text záznamu