Preparation of Ta-O-Based Tunnel Junctions to Obtain Artificial Synapses Based on Memristive Switching

Autor:	Stefan Niehörster, Andy Thomas
Rok vydání:	2014
Předmět:	Micrometre Materials science Tunnel junction law business.industry Optoelectronics Sputter deposition Photolithography business Layer (electronics) law.invention
Zdroj:	Methods in Molecular Biology ISBN: 9781493922383
DOI:	10.1007/978-1-4939-2239-0_16
Popis:	Magnetron sputtering and optical lithography are standard techniques to prepare magnetic tunnel junctions with lateral dimensions in the micrometer range. Here we present the materials and techniques to deposit the layer stacks, define the structures, and etch the devices. In the end, we obtain tunnel junction devices exhibiting memristive switching for potential use as artificial synapses.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f7b304bdf3f1df97410303e0b86f7e18 https://doi.org/10.1007/978-1-4939-2239-0_16 Zobrazit plný text záznamu