Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors
| Autor: | E-L. Sarwe, Torbjörn G.I. Ling, Ivan Maximov, Lars Montelius, Mariusz Graczyk, Babak Heidari |
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| Rok vydání: | 2000 |
| Předmět: |
Materials science
Fabrication Nanotechnology Condensed Matter Physics Key issues Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Nanoimprint lithography Admittance spectroscopy law Nanosensor Scientific method Electrical and Electronic Engineering Photolithography |
| Zdroj: | Microelectronic Engineering. 53:521-524 |
| ISSN: | 0167-9317 |
| Popis: | A complete nanobiosensor structure consisting of a 200 @mm x 200 @mm area containing 100 nm sized interdigitated nanoelectrodes with varied interelectrode distances has been fabricated using nanoimprint lithography (NIL) in combination with UV-lithography. The complete structure has been characterized with admittance spectroscopy. In the paper are discussed the needs and key issues for nanosensors and the capability offered by using NIL for fabrication of such sensors. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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