Dual-Mode Resonator and Switchless Reconfigurable Oscillator Based on Piezoelectric AlN MEMS Technology
| Autor: | J. Van der Spiegel, Chengjie Zuo, Gianluca Piazza |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Electrical engineering Piezoelectricity Computer Science::Other Electronic Optical and Magnetic Materials Vibration Vackář oscillator Resonator CMOS Phase noise Optoelectronics Electrical and Electronic Engineering business Helical resonator |
| Zdroj: | IEEE Transactions on Electron Devices. 58:3599-3603 |
| ISSN: | 1557-9646 0018-9383 |
| DOI: | 10.1109/ted.2011.2162413 |
| Popis: | For the first time, this work demonstrates a switchless dual-frequency (472 MHz and 1.94 GHz) reconfigurable CMOS oscillator using a single piezoelectric AlN microelectromechanical-systems resonator with coexisting S0 and S1 Lamb-wave modes of vibration. High performance (high quality factor Q and electromechanical coupling factor kt2 for a resonator and low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In particular, 1.94-GHz operation has the best phase noise performance at 1-MHz offset when compared with all previously reported CMOS oscillators that work at a similar frequency. |
| Databáze: | OpenAIRE |
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