Characterization of anodic oxide for GaAs-based laser diodes

Autor: S. Lazanu, Rodica V. Ghita, D. Pantelica, F. Negoita
Rok vydání: 2001
Předmět:
Zdroj: ROMOPTO 2000: Sixth Conference on Optics.
ISSN: 0277-786X
Popis: Anodic film oxide was deposited in a alcohol-glycol-water (AGW) solution on n-GaAs for passivation purpose in stripe technology for laser diodes. The characteristics of anodic oxide were measured by scanning electron microscopy (SEM), Rutherford backscattering (RBS) analysis and elastic recoil detection (ERD) techniques. The result indicates a complex oxide structure in the phase base Ga2O3:As2O3(1:1) joined together with carbon bonds. Due to the presence of carbon in anodic oxide, laser diodes are exposed to rapid degradation during operation.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze: OpenAIRE