| Autor: |
Shinji Sakamoto, Yutaka Hojyo, Koki Kuriyama, Morihisa Houga, Syogo Narukawa, Nobuyuki Yoshioka, Toshio Suzuki, Junji Hirumi, Yuichi Kawase |
| Rok vydání: |
2004 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.579130 |
| Popis: |
We have developed a unified mask data format named “OASIS.NEO 1 ” for Variable-Shaped-Beam (VSB) EB writers as enhancement of unified mask data format named “NEO 2 ”. OASIS.NEO is a pattern data format based on OASIS TM3 released as GDSII replacement by SEMI. We have developed OASIS.NEO for practical use of unified mask data formats in mask data preparation (MDP) flow. For practical use, it is necessary to input OASIS.NEO data directly to VSB EB writers just like the native EB data. So we have defined restrictions on OASIS for VSB EB writers referring the restrictions in NEO based on GDSII named “GDSII.NEO 4 ”. In this paper we proposed the specification of OASIS.NEO. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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