Visualization technique of maintenance work with a motion capture sensor

Autor: Tanaka Satoshi, Tsuyoshi Moriya, Munehito Kagaya, Hidefumi Matsui
Rok vydání: 2016
Předmět:
Zdroj: 2016 International Symposium on Semiconductor Manufacturing (ISSM).
DOI: 10.1109/issm.2016.7934511
Popis: A motion capture technique was developed to record a worker's motion during preventive maintenance, especially during the wiping process of wet cleaning. The time-series three-dimensional coordinal data of a worker's hand was successfully obtained with a motion capture sensor, and three different possible movements were distinguished. In addition, the data was correlated with the change in the number of particles on the surface of a chamber part before and after wiping. These results indicate that key indicators of high-quality maintenance work can be extracted from workers' motions using this technique.
Databáze: OpenAIRE