EUV Photochemistry of α-Substituted Antimony Carboxylate Complexes

Autor:	Maximilian Weires, Nitinkumar S. Upadhyay, Michael C. Murphy, Robert L. Brainard, Philip Schuler, Shaheen Hasan, Greg Denbeaux
Rok vydání:	2021
Předmět:	chemistry.chemical_compound Materials science Polymers and Plastics Antimony chemistry Extreme ultraviolet lithography Organic Chemistry Materials Chemistry chemistry.chemical_element Carboxylate Photochemistry
Zdroj:	Journal of Photopolymer Science and Technology. 34:81-86
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.34.81
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f6e2dd0bd13054ea796cb4606042dffc https://doi.org/10.2494/photopolymer.34.81 Zobrazit plný text záznamu