Nanosecond laser pulses-induced surface microstructures on silicon

Autor:	唐多昌 Tang Duochang, 杨宏道 Yang Hongdao, 袁春华 Yuan Chunhua, 李晓红 Li Xiaohong
Rok vydání:	2010
Předmět:	X-ray laser Surface (mathematics) Materials science Silicon chemistry business.industry Optoelectronics chemistry.chemical_element Electrical and Electronic Engineering Nanosecond laser Microstructure business Atomic and Molecular Physics and Optics
Zdroj:	High Power Laser and Particle Beams. 22:393-396
ISSN:	1001-4322
DOI:	10.3788/hplpb20102202.0393
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f6d32011b3174891b7449c6c3545143c https://doi.org/10.3788/hplpb20102202.0393 Zobrazit plný text záznamu