Hybrid III-V/Si DFB laser integration on a 220 mm fully CMOS-compatible silionn photonlcsplotform

Autor:	R. Crochemore, O. Pesenti, A. Schembri, S Domínguez, M. Brihoum, Saddek Bensalem, T. Bria, Loic Sanchez, Karim Hassan, Bertrand Szelag, Christophe Jany, Pierre Brianceau, Ph. Rodriguez, M. C. Roure, Laetitia Adelmini, E. Vermande, B. Montmayeul, E. Ghegin, Fabrice Nemouchi
Rok vydání:	2017
Předmět:	Distributed feedback laser Fabrication Silicon photonics Materials science Silicon business.industry Physics::Optics chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences Waveguide (optics) law.invention Semiconductor laser theory 010309 optics chemistry law 0103 physical sciences Hardware_INTEGRATEDCIRCUITS Optoelectronics Photonics 0210 nano-technology business
Zdroj:	2017 IEEE International Electron Devices Meeting (IEDM).
DOI:	10.1109/iedm.2017.8268450
Popis:	In this paper we demonstrate the first integration of a hybrid III-V/Si laser in a fully CMOS compatible 200mm technology. Device with SMSR up to 50 dB and a maximum output power of 4mW coupled in the waveguide have been measured. The fabrication flow is fully planar and compatible with large scale integration silicon photonics circuit.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f6bc18d4e9dba5c9fdc77fb3ce705a78 https://doi.org/10.1109/iedm.2017.8268450 Zobrazit plný text záznamu