Realisation of silicon based dielectrics anti-resonant reflecting optical waveguide (ARROW) on InP by photochemical deposition
| Autor: | Y.I. Nissim, A. Sayah, E. Toussaere |
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| Rok vydání: | 2002 |
| Předmět: |
Fabrication
Materials science Silicon business.industry Physics::Optics chemistry.chemical_element Dielectric Chemical vapor deposition Condensed Matter::Materials Science chemistry.chemical_compound Optics chemistry Etching (microfabrication) Indium phosphide Power dividers and directional couplers Optoelectronics Thin film business |
| Zdroj: | Proceedings of 8th International Conference on Indium Phosphide and Related Materials. |
| DOI: | 10.1109/iciprm.1996.492042 |
| Popis: | A basic dielectric waveguide structure (anti-resonant reflexion optical waveguide) has been studied and fabricated directly on InP. The use of photo-assisted deposition techniques has allowed us to taylor the structural properties of each deposited film. The resulting ARROW structure has many applications including optical directional couplers. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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