Effect of Nitrogen Partial Pressure on the Structural and Mechanical Properties of (Monbtaw)Nx Thin Films Deposited at Room Temperature
| Autor: | Saikumar Katta, Prasanth Reddy Sadula, BHARATH KUMAR B, Venkata Girish Kotnur |
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| Rok vydání: | 2023 |
| Databáze: | OpenAIRE |
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