Correlation of structural and optical properties of PVD grown amorphous carbon thin films
| Autor: | Mukul Bhatnagar, Infant Solomon, Mukesh Ranjan, Krishnanand Shukla, Arun Sarma, Bornali Sarma |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Scanning electron microscope Mechanical Engineering Analytical chemistry Diamond 02 engineering and technology General Chemistry Surface finish Sputter deposition engineering.material 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Electronic Optical and Magnetic Materials symbols.namesake Carbon film Amorphous carbon Materials Chemistry Surface roughness engineering symbols Electrical and Electronic Engineering 0210 nano-technology Raman spectroscopy |
| Zdroj: | Diamond and Related Materials. 75:69-77 |
| ISSN: | 0925-9635 |
| Popis: | Amorphous carbon films have been deposited using DC magnetron sputtering in pure argon environment. The temperature induced changes in the microstructure of these thin films were studied with respect to changes in Raman D and G band positions and their intensity ratios. Films deposited at temperatures between 300 °C–400 °C shows more diamond like behavior, while graphitization dominates at 500 °C. The results are further supported by analysis of the refractive index values as obtained through spectroscopic ellipsometry and from analysis of the surface morphology and roughness using Scanning Electron Microscope (SEM) and corresponding Energy Dispersive X-ray spectroscopy (EDAX). A theoretical calculation has also been done to understand the surface roughness of the coated sample using WAVELET analysis. Finally experimentally measured surface roughness of the DLC sample has been compared with the theoretically calculated values and presented here. |
| Databáze: | OpenAIRE |
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