Microfabrication of circuits for magnetic bubbles of diameter 1 μm and 2 μm

Autor:	J. B. Kruger, R. K. Watts, T. G. Blocker, M. S. Shaikh, D. C. Guterman, D. C. Bullock, J. T. Carlo, H. M. Darley
Rok vydání:	1976
Předmět:	Permalloy Materials science Physics and Astronomy (miscellaneous) business.industry Cathode ray Optoelectronics Nanotechnology Ion milling machine Magnetic bubbles business Lithography Microfabrication Electronic circuit
Zdroj:	Applied Physics Letters. 28:355-357
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.88757
Popis:	We describe microfabrication techniques for Permalloy circuits for magnetic bubbles of diameter 1 μm and 2 μm. Patterns are defined by electron beam on an x‐ray mask. X‐ray lithography and ion milling are employed to replicate the pattern in Permalloy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f64200e7437e5722d2ee08d8f1bbb5a3 https://doi.org/10.1063/1.88757 Zobrazit plný text záznamu