Low Frequency Noise Characteristics on Al/Nb2O5/p-type Schottky Diode Fabricated by Pulsed DC Magnetron Sputtering

Autor:	Il Hwan Cho, Sang Jik Kwon, Eou Sik Cho, Jong-Ho Lee, Hyun Gon Oh, Kyung Soo Kim, Jimi Eom
Rok vydání:	2013
Předmět:	Materials science business.industry Infrasound Analytical chemistry Pulsed DC Schottky diode General Chemistry Sputter deposition Condensed Matter Physics Sputtering Cavity magnetron Optoelectronics General Materials Science Thin film business Noise (radio)
Zdroj:	Molecular Crystals and Liquid Crystals. 586:168-178
ISSN:	1563-5287 1542-1406
Popis:	Nb2O5films were deposited with pulsed DC magnetron sputter which is versatile and provides the ability to deposit thin film of oxide compounds with high deposition rate. Current measurement data from the metal-insulator-semiconductor (MIS) structure followed Schottky emission mechanism andreverse current characteristics were analyzed with oxygen flow rate variation. Low frequency noise measurements have been carried out with MIS samples at the forward conduction region. The experimental noise data have been successfully explained by the random walk model. The effect of O2flow rate of deposition process on low frequency noise has also been investigated and analyzed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f60c1f619bb3f42f8f3fc03b79f11ed0 https://doi.org/10.1080/15421406.2013.853551 Zobrazit plný text záznamu