Droplet Evaporation and Watermark Formation on Si Wafers with Various Films

Autor:	Shohei Shima, Akira Fukunaga, Ayako Yano, Naoyuki Handa, Kazuki Matsumoto, Hirokuni Hiyama, Kenji Amagai
Rok vydání:	2020
Předmět:	Materials science Mechanical Engineering Chemical-mechanical planarization Wafer Watermark Composite material Droplet evaporation
Zdroj:	Journal of the Japan Society for Precision Engineering. 86:65-70
ISSN:	1882-675X 0912-0289
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f5fa4c51ce4124913b29fb0a76591bed https://doi.org/10.2493/jjspe.86.65 Zobrazit plný text záznamu