Mechanical failure dependence on the electrical history of lead zirconate titanate thin films
Autor: | M. Ritter, Raul Bermejo, Susan Trolier-McKinstry, Kathleen Coleman |
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Rok vydání: | 2021 |
Předmět: |
010302 applied physics
Materials science Weibull modulus 02 engineering and technology Bending 021001 nanoscience & nanotechnology Lead zirconate titanate 01 natural sciences Piezoelectricity Stress (mechanics) chemistry.chemical_compound chemistry Stack (abstract data type) 0103 physical sciences Materials Chemistry Ceramics and Composites Dissipation factor Thin film Composite material 0210 nano-technology |
Zdroj: | Journal of the European Ceramic Society. 41:2465-2471 |
ISSN: | 0955-2219 |
Popis: | Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ0 ∼ 433 ± 30 MPa). in situ er and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film’s fracture resistance. |
Databáze: | OpenAIRE |
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