Pressure sensors based on the metal-semiconductor mesa-structures

Autor:	Alexandr N. Sofronkov, Shamil D. Kurmashev, Andrey A. Gradoboev, Andjey Gavdzick
Rok vydání:	1997
Předmět:	Semiconductor Materials science Field (physics) Wave propagation business.industry Refractory metals Optoelectronics Semiconductor device business Pressure sensor Motion sensors Metal semiconductor
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.284527
Popis:	Results of investigations in the field of scientific problems are presented and prospects for creation of new pressure sensors, based on the pressure-sensitivity effect in metal-semiconductor mesa-structures, are analyzed in this paper. Principle characteristics of such devices - motion sensors, vibrometers, deflectometers, elastic wave meters are discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f5ce352e9c3e32d9389788fbe012e970 https://doi.org/10.1117/12.284527 Zobrazit plný text záznamu