Designing Reduced‐Order Models for Rapid Thermal Processing Systems
| Autor: | Klavs F. Jensen, Suman Banerjee, J. Vernon Cole |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
Process modeling
Renewable Energy Sustainability and the Environment Differential equation Computer science Computation Eigenfunction Condensed Matter Physics Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials Nonlinear system Materials Chemistry Electrochemistry A priori and a posteriori Applied mathematics Galerkin method |
| Zdroj: | Journal of The Electrochemical Society. 145:3974-3981 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/1.1838901 |
| Popis: | A technique for developing fast process models for rapid thermal processing (RTP) systems is described. The modeling strategy uses a priori knowledge of the process behavior to construct a model with relatively few unknowns. The resulting nonlinear model can then be used to extrapolate beyond the original knowledge base. Using the proper orthogonal decomposition method, the a priori information is extracted in the form of empirical eigenfunctions from transient simulation results of a detailed physically based finite element model (FEM). Low-order nonlinear models are then constructed using the empirical eigenfunctions as a basis set in a pseudospectral Galerkin approximation to the physical model, i.e., the governing partia differential equations. The predictions rom models developed in this fashion show good agreement with steady-state and transient responses of the physically based FEM. In particular, the low-order models are shown to accurately replicate an actual RTP processing cycle in a typical process chamber with an order-of-magnitude reduction in computation time compared to the detailed FEM. |
| Databáze: | OpenAIRE |
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