| Popis: |
Dimensional measurement of surface topography with a probe microscope requires surface proximity sensing, probe position measurement, a probe with known shape, and careful analysis of the image generated. Our probe microscope contains some novel features. The proximity detector is a magnetically constrained rocking‐beam force sensor stabilized with a capacitance‐based force‐balance system. This sensor accepts a wide range of probe tips, which are fabricated separately. The probes are either focused‐ion‐beam etched metal or chemically etched optical fibers. We show measurements of features arising from semiconductor manufacture. |
