Laser Annealing of Oxide Films on the Sapphire Surface

Autor:	S. P. Malyukov, A. V. Sayenko, Yu. V. Klunnikova
Rok vydání:	2015
Předmět:	Materials science business.industry Oxide Recrystallization (metallurgy) Laser Atomic and Molecular Physics and Optics law.invention Amorphous solid chemistry.chemical_compound Wavelength Optics chemistry law Sapphire Optoelectronics Crystallite Irradiation business Engineering (miscellaneous)
Zdroj:	Journal of Russian Laser Research. 36:276-280
ISSN:	1573-8760 1071-2836
DOI:	10.1007/s10946-015-9500-5
Popis:	We investigate experimentally laser annealing of oxide films on the sapphire surface at the LIMO 100-532/1064-U facility. The treatment is performed using a Nd:YAG solid-state laser of a fixed wavelength of 1,064 nm. We present the results of morphology studies of iron-oxide film surfaces by atomic force microscopy. We obtain the dependence of the film-surface peak height on the laser irradiation power. We show that a laser irradiation power of the order of 90 W is sufficient for the formation of crystal grains and transition to the polycrystalline structure of the film. We show that, depending on the laser-irradiation parameters, the film-surface quality can be refined due to the recrystallization of amorphous layers.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f5804f5bd6d3c5a034977c097e9916cb https://doi.org/10.1007/s10946-015-9500-5 Zobrazit plný text záznamu Full text from SpringerLink