High-Tc Josephson junctions on micro V-shape groove prepared by focused ion beam
| Autor: | K. Suzuki, N. Yutani, Y. Enomoto |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
Josephson effect
High-temperature superconductivity Materials science business.industry Substrate (electronics) Condensed Matter Physics Focused ion beam Electronic Optical and Magnetic Materials law.invention Cross section (physics) Thermal conductivity law Optoelectronics Critical current Electrical and Electronic Engineering business Groove (engineering) |
| Zdroj: | IEEE Transactions on Appiled Superconductivity. 9:2878-2881 |
| ISSN: | 1051-8223 |
| DOI: | 10.1109/77.783630 |
| Popis: | For Josephson junctions using a narrow groove on a substrate etched by a focused ion beam (FIB), there is a strong relation between junction properties and groove shapes. We have developed the FIB milling method which has flexibility to produce a variety of different groove shapes. V-shape grooves with different sizes (width=215-594 nm, depth=27-92 nm) have been formed with the same slope angle on the MgO [100] substrate. The top surface profile of the 300 nm thick YBa/sub 2/Cu/sub 3/O/sub 7/ (YBCO) film had the same V-shape as the grooves on the substrate, but the YBCO groove widths were 110 nm narrower than the FIB groove widths. The 3 /spl mu/m width junctions fabricated on these grooves showed RSJ type I-V curves without exception and had the average of critical current (Ic) values of 0.520 mA at 4.2 K. |
| Databáze: | OpenAIRE |
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