Physical Patterning Performance in the Modified Layer Extraction Rule with an Image Sensor Device
Autor: | Sung Gyu Pyo, Areum Kim, Kang-Won Lee, EunMi Choi, Yuan Gao, Keunwon Kang, Yinhua Cui, Ho Jae Shim |
---|---|
Rok vydání: | 2017 |
Předmět: | |
Zdroj: | Journal of Nanoscience and Nanotechnology. 17:7810-7813 |
ISSN: | 1533-4880 |
DOI: | 10.1166/jnn.2017.14849 |
Databáze: | OpenAIRE |
Externí odkaz: |