Lateral porous silicon membranes with size and charge selectivity
| Autor: | Yingning He, David Bourrier, Eric Imbernon, Thierry Leichle |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Fabrication business.industry 010401 analytical chemistry Microfluidics Doping Silicon on insulator Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology Porous silicon 01 natural sciences 0104 chemical sciences Membrane Optoelectronics Fluidics 0210 nano-technology Porosity business |
| Zdroj: | NEMS |
| Popis: | In this work, we present methods for the fabrication of lateral porous silicon membranes with size and charge selectivity, and their monolithic integration into planar microfluidics as opposed to classical porous silicon membranes with perpendicular pores that are used in hybrid 3D fluidic systems. Our approach is based on the use of locally patterned electrodes to guide pore formation horizontally within the membrane in combination with locally doped substrates to spatially localize the porous silicon within the channel depth. Membranes with lateral pores and tunable porosity were successfully fabricated by these methods. The dead-end filtration capability and the cation perm-selectivity of the fabricated membranes were also demonstrated, thus enabling on-chip size- and charge-based separation. |
| Databáze: | OpenAIRE |
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