A novel high-quality and high-efficiency immersion fluid chemical mechanical polishing process for integral impellers
Autor: | Longxing Liao, Luo Shanming, Xuefeng Chang, Shengping Fu, Jingyu Mo |
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Rok vydání: | 2022 |
Předmět: | |
Zdroj: | The International Journal of Advanced Manufacturing Technology. 125:613-628 |
ISSN: | 1433-3015 0268-3768 |
Databáze: | OpenAIRE |
Externí odkaz: |