Fabrication of suspended nanowires for highly sensitive gas sensing
| Autor: | Jungwook Choi, Dae Hyun Baek, Jongbaeg Kim |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Fabrication
Materials science Hydrogen Nanowire chemistry.chemical_element Nanotechnology 02 engineering and technology Carbon nanotube Photoresist 010402 general chemistry 01 natural sciences Hydrogen sensor law.invention law Materials Chemistry Electrical and Electronic Engineering Instrumentation Non-blocking I/O Metals and Alloys 021001 nanoscience & nanotechnology Condensed Matter Physics 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Electrode 0210 nano-technology |
| Zdroj: | Sensors and Actuators B: Chemical. 284:362-368 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2018.12.159 |
| Popis: | Nanowires suspended above substrates are advantageous as gas sensing materials compared to substrate-bound ones for their better exposure to gas molecules and suppressed undesirable interaction with the substrates. Here, we report a method to fabricate nanowires suspended between electrodes, using suspended carbon nanotubes as sacrificial template. Since all the fabrication steps are scalable process without any exposure of nanowires to photoresist or solvents, the sensors with suspended nanowires could be mass-produced suppressing possible contamination or damage. We could also successfully fabricate suspended nanowires using four different kinds of materials (PdO, NiO, SnO2, and WO3). As an exemplary device, hydrogen sensor was demonstrated by forming suspended Pd nanowires between two electrodes, and it could detect 10 ppm hydrogen gas diluted with air at room temperature. This high sensitivity to gas is attributed to the high surface area and small diameter of the suspended nanowires, and the wide variety of material choice with similar morphology of suspended nanowires may be harnessed for the fabrication of highly sensitive gas sensors with diverse sensing targets. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect