Characterization of d.c.jet CVD diamond films on molybdenum
| Autor: | D.F. Bahr, D.V. Bucci, L.S. Schadler, J.A. Last, J. Heberlein, E. Pfender, W.W. Gerberich |
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| Rok vydání: | 1996 |
| Předmět: |
Auger electron spectroscopy
Materials science Synthetic diamond Mechanical Engineering Analytical chemistry Diamond Mineralogy General Chemistry Chemical vapor deposition engineering.material Nanocrystalline material Electronic Optical and Magnetic Materials law.invention symbols.namesake Carbon film X-ray photoelectron spectroscopy law Materials Chemistry engineering symbols Electrical and Electronic Engineering Raman spectroscopy |
| Zdroj: | Diamond and Related Materials. 5:1462-1472 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/s0925-9635(96)00567-5 |
| Popis: | Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistry, morphology, and mechanical properties are explored using microscopy, Raman spectroscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The characteristics of films grown using two different nucleation enhancement techniques are shown. Films grown using high methane concentrations at the beginning of growth produce large grained columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp3 and sp2 bonding and peak shifts are tracked through the thickness of the film, corresponding to variations in the methane concentration during growth. Stresses are measured using peak shifts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roughness increase. |
| Databáze: | OpenAIRE |
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