Summary Abstract: Characterization of ion beam deposited diamondlike carbon coating on semiconductors

Autor:	Vik J. Kapoor, P. V. Koeppe, Bruce A. Banks, Michael J. Mirtich, D. A. Gulino
Rok vydání:	1985
Předmět:	Materials science Ion beam Ion beam mixing business.industry Analytical chemistry Surfaces and Interfaces Condensed Matter Physics Surfaces Coatings and Films Characterization (materials science) Semiconductor Ion beam deposition Optoelectronics Carbon coating business
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 3:2327-2328
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.572875
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f4846112387bc9ac5d5c96b83d254f13 https://doi.org/10.1116/1.572875 Zobrazit plný text záznamu