Reliable peripheral anchor-assisted transfer printing of ultrathin SiO2 for a transparent and flexible IGZO-based inverter
| Autor: | Tae Jin Yoo, Jung Il Yoo, Jongjun Park, Byoung Hun Lee, Heung Cho Ko, Sung-Hoon Choa, Hun Soo Jang, Juhwan Jang, Seung Hyun Kim, Jongwon Yoon, Oh Young Kwon, Sang Myeong Kang |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Silicon dioxide business.industry 02 engineering and technology Substrate (printing) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Transfer printing 0103 physical sciences Polyethylene terephthalate Optoelectronics Process window Electronics Adhesive Electrical and Electronic Engineering 0210 nano-technology business Layer (electronics) |
| Zdroj: | Microelectronic Engineering. 197:15-22 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2018.05.003 |
| Popis: | This study demonstrates the utility of a printable ultrathin silicon dioxide (SiO2) substrate for developing highly transparent and flexible electronic devices. SiO2 provides a wider thermal process window than that of plastics, which is necessary for producing various electronics. To manipulate this fragile material, we employed a supportive handling substrate and transfer printing process using a sacrificial layer and protruding SU-8 anchors. In particular, we characterized the interfacial stress level and mechanics between the SiO2 substrate and the anchors during the retrieval process. We also manipulated the configuration of the corner of the SiO2 substrate to develop a reliable transfer printing process, which resulted in a high transfer yield with no distortion or fracture of the SiO2 patterns. As an example to demonstrate the utility of this method, we successfully developed a transparent and flexible thin-film inverter based on amorphous indium gallium zinc oxide (IGZO) with an 84.7% average optical transmittance on a polyethylene terephthalate (PET) film with an adhesive layer. |
| Databáze: | OpenAIRE |
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