Low-Frequency Series-Resistance Analytical Modeling of Three-Dimensional Metal–Insulator–Metal Capacitors
| Autor: | D. Tsamados, Raphael Clerc, Laurent Montès, A. Bajolet, Philippe Delpech, J.-C. Giraudin, G. Pananakakis, N. Segura, Gerard Ghibaudo, E. Picollet |
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| Rok vydání: | 2007 |
| Předmět: |
Engineering
Computer simulation Equivalent series resistance business.industry Integrated circuit Mechanics Low frequency Capacitance Electronic Optical and Magnetic Materials law.invention Capacitor law Scattering parameters Electronic engineering Electrical and Electronic Engineering Reduction (mathematics) business |
| Zdroj: | IEEE Transactions on Electron Devices. 54:742-751 |
| ISSN: | 1557-9646 0018-9383 |
| Popis: | This paper discusses the optimization of series resistance of nonplanar metal-insulator-metal capacitor, i.e., an original 3-D capacitor with a capacitance density of 35 nF/mm2, used in very large scale integration. A fully analytical and physically based model of its series resistance versus material and geometrical parameters has been developed, in excellent agreement with both 3-D numerical simulations and experiments. Based on the modeling results, possible design strategies of series-resistance reduction are suggested; showing a reduction of the series resistance by approximately a factor of four, without any degradation of the capacitance density |
| Databáze: | OpenAIRE |
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