A-04 Quantitative evaluation of cleaning effect by the high-pressure jet in CMP hard pad : For jet pressure and standoff distance
| Autor: | Yutaka Wada, Chikako Takato, Syuhei Kurokawa, Masashi Kitamura, Terutake Hayashi, Hirokuni Hiyama, Yuta Tokumoto |
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| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | The Proceedings of Conference of Kyushu Branch. :9-10 |
| ISSN: | 2424-2780 |
| DOI: | 10.1299/jsmekyushu.2016.69.9 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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