Thermal-piezoresistive pumping on double SiC layer resonator for effective quality factor tuning

Autor:	Pablo Guzman, Toan Dinh, Afzaal Qamar, Jaesung Lee, X.Q. Zheng, Philip Feng, Mina Rais-Zadeh, Hoang-Phuong Phan, Thanh Nguyen, Abu Riduan Md Foisal, Huaizhong Li, Nam-Trung Nguyen, Dzung Viet Dao
Rok vydání:	2022
Předmět:	Metals and Alloys Electrical and Electronic Engineering Condensed Matter Physics Instrumentation Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Sensors and Actuators A: Physical. 343:113678
ISSN:	0924-4247
DOI:	10.1016/j.sna.2022.113678
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f417ffec6d6d476c72672ccfebbedbaf https://doi.org/10.1016/j.sna.2022.113678 Zobrazit plný text záznamu Full Text from ScienceDirect