Fabrication of ZnO-based metal–insulator–semiconductor diodes by ion implantation

Autor: V. V. Mamedov, David C. Look, M. V. Chukichev, Ya. I. Alivov, A.N. Pustovit, V. I. Zinenko, Yu.A. Agafonov, B. M. Ataev
Rok vydání: 2004
Předmět:
Zdroj: Solid-State Electronics. 48:2343-2346
ISSN: 0038-1101
DOI: 10.1016/j.sse.2004.05.063
Popis: A ZnO-based metal–insulator–semiconductor junction has been fabricated using an isolation layer fabricated by N+ ion implantation. I–V dependences show a good rectifying diode-like behavior with a low leakage current of 10−6 A and a threshold voltage of about 3 V. Ultraviolet light emission under forward bias exhibits a wavelength maximum of 388 nm and a full width at half maximum of 128 meV at room temperature.
Databáze: OpenAIRE