| Popis: |
The concept of traceability is presented for the interferometric form measurement of optical surfaces. The calibration chain for interferometric flatness measurement is evaluated in detail, showing that only a few influence quantities are significant. For spherical surfaces, the complexity increases as the measurement separates into sphericity and radius measurement. Traceability in asphere metrology is much more complex, and some aspects are discussed in terms of the example of the Tilted-Wave Interferometer concept. |
