Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame
| Autor: | Mohammad I. Younis, Nouha Alcheikh, Rodrigo Tumolin Rocha, Fahimullah Khan |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Physics
Mechanical Engineering Portal frame Resonance 02 engineering and technology 021001 nanoscience & nanotechnology Electrostatics 01 natural sciences Finite element method Computational physics Vibration Nonlinear system Resonator 0103 physical sciences Electrode Electrical and Electronic Engineering 0210 nano-technology 010301 acoustics |
| Zdroj: | Journal of Microelectromechanical Systems. 29:1362-1371 |
| ISSN: | 1941-0158 1057-7157 2020-0269 |
| DOI: | 10.1109/jmems.2020.3020230 |
| Popis: | We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269] |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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