| Popis: |
ZnO is a high-mobility electron conductor being considered for high-throughput electronics in flexible and transparent formats. We demonstrated the Zn β-ketoiminate system, based on acetylacetimine with N-propyl, isopropyl, and butyl groups, as a vehicle for preparing ZnO thin films for electronic applications. Surface carbon was a primary impurity, and the precursors studied afforded films with the lowest surface carbon contamination at deposition temperatures near 400°C. Thermal annealing of the films reduced the surface carbon content and afforded semiconducting materials. Annealing also gave larger-grained, better connected films. Thinner films were associated with semiconducting as opposed to ohmic behavior; such films will be adaptable for transparent logic circuits. Copyright © 2012 John Wiley & Sons, Ltd. |
