| Autor: |
Kuniyasu Nakamura, Akira Kageyama, Mizuno Takayuki, Hiroaki Matsumoto, Yasuhira Nagakubo, Yuya Suzuki, Hiroyuki Tanaka |
| Rok vydání: |
2017 |
| Předmět: |
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| Zdroj: |
2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). |
| Popis: |
To realize higher spatial resolution than conventional SEM-based nano-probing system, a novel Electron Beam Absorbed Current imaging system was newly developed using a Hitachi HD-2700 200 kV dedicated STEM. Its specimen holder accommodates a mechanical probe for current detection and TEM grid specimen. This holder also has a micrometer-based coarse positioning and piezoelectric-elements-based fine positioning mechanism respectively for X, Y and Z-axis probe control. The absorbed current from the probe and the specimen are displayed as an image by STEM software via EBAC amplifier. We successfully made a probing onto FIB-prepared lamella specimen of semiconductor device to get an electrical contact. EBAC and EBIC images were clearly visualized in higher spatial resolution. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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