Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process

Autor:	Shih Hsuan Kuo, Wei Cheng Wang, Shu-Ping Dong, Hung-Ming Tai, Yi-Chang Chen, Chun-Chieh Wang
Rok vydání:	2010
Předmět:	In situ Materials science business.industry Confocal Process (computing) Nanoimprint lithography law.invention Roll-to-roll processing Vibration Optics law Chromatic scale Z-scan technique business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.860565
Popis:	The in-situ measurements for continuously rolling optical films by the chromatic confocal apparatus have been successfully achieved by the authors. The apparatus presented here consists of chromatic confocal to avoid the vibrations caused by the roller machine while working. Without the need of the vertical z axis scan, chromatic confocal can give instant thickness measurements. Therefore, the apparatus possesses the characters of high resolution and fast response. We believe that this system can highly monitor and improve the yield rate in production lines.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f3b25c33b153305e796fd8b571a4c616 https://doi.org/10.1117/12.860565 Zobrazit plný text záznamu