Nanoreplication in polymers using hot embossing and injection molding
| Autor: | S. Köppel, Laura J. Heyderman, Helmut Schift, Christian David, W. Kaiser, L. Scandella, M. Gabriel, Jens Gobrecht |
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| Rok vydání: | 2000 |
| Předmět: |
chemistry.chemical_classification
Nanostructure Materials science business.industry Compact disc Molding (process) Polymer Replication (microscopy) Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics chemistry Optoelectronics Nanometre Dry etching Electrical and Electronic Engineering business Electron-beam lithography |
| Zdroj: | Microelectronic Engineering. 53:171-174 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/s0167-9317(00)00289-6 |
| Popis: | With polymer molding techniques, it is possible to fabricate nanostructures with a replication fidelity of 25 nanometers. Both hot embossing and injection molding can be used, and cycle times of down to 4 sec can be achieved in a CD injection molding process. The resolution is far below the structure size found today in compact disc memory media. The master structures are produced by electron beam lithography and subsequent dry etching. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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