Moiré Fringe-Based Focusing-Test Scheme for Optical Projection Lithography

Autor:	李艳丽 Li Yanli, 严伟 Yan Wei, 王建 Wang Jian, 陈铭勇 Chen Mingyong
Rok vydání:	2011
Předmět:	Scheme (programming language) Optics Computer science business.industry Moiré pattern business Projection (set theory) Lithography computer Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials computer.programming_language
Zdroj:	Acta Optica Sinica. 31:0805001
ISSN:	0253-2239
DOI:	10.3788/aos201131.0805001
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f38278aa9446ab1d809dd8d011214143 https://doi.org/10.3788/aos201131.0805001 Zobrazit plný text záznamu