Surface treatment of thin films deposited by plasma PECVD prepared for an application as biocide material

Autor: F. A. Teniou, M. Kihel, S. Sahli
Rok vydání: 2022
Zdroj: 2022 2nd International Conference on Advanced Electrical Engineering (ICAEE).
DOI: 10.1109/icaee53772.2022.9962064
Databáze: OpenAIRE