A Robust Electrochemical Humidity Sensor for the Detection of Relative Humidity Using Room Temperature Ionic Liquid (RTIL) for Integration in Semiconductor IC's
| Autor: | Badrinath Jagannath, Shalini Prasad, Ashlesha Bhide, Edward Graef |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
business.industry Humidity 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology Electrochemistry 01 natural sciences 0104 chemical sciences Electronic Optical and Magnetic Materials chemistry.chemical_compound Semiconductor chemistry Chemical engineering Ionic liquid Relative humidity 0210 nano-technology business |
| Zdroj: | ECS Journal of Solid State Science and Technology. 7:Q3043-Q3048 |
| ISSN: | 2162-8777 2162-8769 |
| DOI: | 10.1149/2.0091807jss |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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