Study on Surface Roughness of Substrates under Different Cleaning Techniques by Total Integrated Scatter

Autor:	侯海虹 Hou Haihong, 张大伟 Zhang Dawei, 沈健 Shen Jian, 范正修 Fan Zhengxiu
Rok vydání:	2009
Předmět:	Materials science Surface roughness Electrical and Electronic Engineering Composite material Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Chinese Journal of Lasers. 36:1559-1562
ISSN:	0258-7025
DOI:	10.3788/cjl20093606.1559
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f31e7372264e2a7591a604f54e8b3071 https://doi.org/10.3788/cjl20093606.1559 Zobrazit plný text záznamu