| Popis: |
An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N2/O2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100 nm thick with a good permeation barrier of ≈1.8 × 10−3 g · m−2 · day (at 40 °C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process. |
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