Properties of Ge and GeOx Thin Films Deposited by Magnetron Sputtering

Autor:	Marius Grigonis, Markus K. Tilsch, Karen Denise Hendrix
Rok vydání:	2010
Předmět:	Materials science Band-pass filter business.industry Infrared Cavity magnetron Pulsed DC Optoelectronics Sputter deposition Thin film business Durability Refractive index
Zdroj:	Optical Interference Coatings.
DOI:	10.1364/oic.2010.ma8
Popis:	Optical properties of pulsed DC magnetron sputtered Ge and GeOx layers are reported. Complex multilayer infrared bandpass filters were successfully fabricated. However, these coatings exhibit severe environmental durability issues which may limit their applications.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f2ed66a0721ff5a052bb15a5ee9900d1 https://doi.org/10.1364/oic.2010.ma8 Zobrazit plný text záznamu