Power supply output inductance effect on arc parameters of high-power impulse magnetron sputtering
| Autor: | V O Oskirko, A P Pavlov, A Z Zakharov, V A Semenov, M I Azhgikhin, A A Solovyev |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Journal of Physics: Conference Series. 2291:012022 |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/2291/1/012022 |
| Popis: | The paper studies the influence of the power supply output inductance on the arc parameters, which form on the sputtered target surface during high-power impulse magnetron sputtering. The arc energy, lifetime and maximum current are measured by the up-to-date power source and the proposed arc simulation circuit at various output inductance values. The experimental data are compared with the simulation results. The paper presents a brief model description for the arc parameter calculations. According to the experimental data, the decrease in the output inductance leads to the increase in the peak current, arc lifetime and energy. It is shown that the energy recuperation stored in the output inductance allows reducing the arc energy. Also, self-locking of control transistor occurs at a lower value (∼1 µH) of the output inductance, leading to the reduction in the current amplitude and the additional decrease in the arc energy. |
| Databáze: | OpenAIRE |
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